二手 KARL SUSS / MICROTEC Gamma DSSP #9232865 待售
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ID: 9232865
優質的: 2013
Coater / Developer system
4M
Quantity / Part number / Description
(1) / V700041 / SUSS Gamma microlithography cluster 4M
(1) / 100005154 / SUSS Gamma frame extension 2S
(1) / 100005155 / SUSS Gamma adjustable air flow cover 4M
(1) / 100009611 / Safety interlock for all doors on the system
(1) / 100005513 / Auto carrier ID dialog
(1) / V700032 / Bar code reader for sequence selection
(1) / 100009610 / Single end effector robot (SR8230)
(1) / V711021 / Optical cassette scanner
(1) / 100001254 / Special stacked (4) I/O gamma
(1) / Q11986-08 / Carrier-LEDs for (2) carriers
(1) / 100010113 / Rotational pre-aligner
(1) / Q200286-01 / Special fork type vacuum end effector R4-R6 for robot with minimized heat transfer
(2) / V709001 / SUSS Topography coater alta sprays
(2) / - / Special substrate assembly R6 alta sprays BSR
(2) / V734510 / Resist spray dispense system up to 30cP with filter and reservoirs
(2) / V723000 / Resist bottle holders
(2) / V723010 / Resist bottle adapters
(2) / V734520 / Pre wet dispense nozzle alta sprays
(2) / V734540 / BSR Dispense option alta sprays, 50ml
(2) / V734545 / Additional chuck vacuum lines
(2) / V745120 / Filter unit solvents
(1) / V736101 / Aqueous process module
(1) / V736111 / Programmable dispense arm AQ
(1) / V736135 / Substrate assembly R4-R6 AQ
(1) / V736300 / Puddle dispense system AQ
(1) / V736320 / Fan spray dispense system AQ
(1) / Q736320 / Fan spray dispense system AQ for 3rd line
(1) / V736340 / Topside rinse dispense AQ
(6) / V736390 / Flow detection sensors AQ
(1) / V745100 / Filter unit DI-water
(1) / V745110 / Filter unit AQ developer
(1) / V738030 / Nitrogen drying option
(1) / V740010 / Hot / Cool plate / Vacuum prime stack module
(2) / V744110 / Hot plate cassette 250° C proximities
(2) / V744230 / Cool plate cassette proximities
(1) / V744300 / Vacuum primer
(1) / 100000699 / Substrate assembly vacuum primer R2-R8
(1) / V744340 / Pressure tank system (5L Stainless steel / HMDS) / Bubbler
(1) / V744350 / Safety package HMDS
(1) / V826020 / JULABO FL601 TCU (50 Hz)
(3) / V760011 / Media storage stainless steels
(1) / V760120 / Pressure tank system (10L stainless steel bulk fill)
(2) / 100005184 / Pressure tank systems (5L PE bulk fill) KALREZ
(1) / V760240 / Waste canister (20L stainless steel) quick
(1) / V772005 / Additional gas monitor
2013 vintage.
KARL SUSS/MICROTEC Gamma DSSP是一種高精度的光阻設備，在半導體工業中廣泛用於制造微芯片。該系統采用了高功率的紫外線光源，結合了精密的光學元件，可以在一系列光刻材料上產生精確的圖案。該裝置的核心是伽馬光源，它以一個1200瓦的氙弧燈為基礎。這使得機器能夠產生一個高度聚焦的紫外線柱，在功率和曝光時間上都可以調節。光束由一組透鏡和鏡子成形和準直，然後指向基板。該工具的核心是CCD定位器，它允許基板相對於光源精確且可重復對準。這樣可以確保精確的光量在表面正確的位置傳遞。CCD定位器還能夠檢測基板的存在，並進行必要的調整以正確聚焦光線。除了高功率光源和光學設備外，該資產還包括一套精密控制電子設備。這樣可以對光源和光學器件進行微調，以確保實現光刻膠的最佳曝光。精確控制光照可確保將微小的細節精確地傳遞到光刻膠上。MICROTEC Gamma DSSP光刻膠模型能夠在單層和雙層光刻膠上產生高度精確的圖樣。它在整個半導體行業被廣泛用於生產各種各樣的集成電路和微芯片。KARL SUSS Gamma DSSP結合了精密的光學、精密的控制電子和高功率的光源，能夠產生非常高的細節和精確度的圖樣。
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