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ULVAC V10-100LC #9373107

ULVAC

V10-100LC

Vertical furnace, 6" Process: HTO / Nitride Gases: N2, SiH2Cl2, N2O, NH3, SiH4 2003 vintage.
202
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ULVAC V10-100LC #9350452

ULVAC

V10-100LC

Vertical furnace, 6" Process: Sin / HTO Main body Control unit Heater JIG Duct unit Top cover (6) Qu
207
ULVAC V10-100LC #9291898

ULVAC

V10-100LC

System 1998 vintage.
199