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ULVAC V8-100LC #9373098

ULVAC

V8-100LC

Vertical furnace, 6" Process: D-Poly Gases: N2, SiH4, Ph3, ClF3 Temperature: 800°C Pressure: 130 Pa
216
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ULVAC V8-100LC #9350448

ULVAC

V8-100LC

Vertical furnaces, 6" Process: Poly-Si (2) Main body Duct unit (2) Doors Control unit Heater Top cov
274