用 KLA / TENCOR ASET-F5x #9363501 待售的
ID#: 9363501
Film thickness measurement system, 8"-12"
Open cassette loader, 8"-12"
PDBS (Ehanced)
Dual beam spectrometer (XENON Lamp)
Spectroscopic Ellipsometer (SE)
DUV SE (Deep UV SE, 190 nm)
Pat maximum: 8100
CPU
Frequency: 2.6 GHz
Operating system: Windows NT.
製造商:
KLA / TENCOR模型:
ASET-F5x晶圓尺寸:
8"-12"設備詳細信息:
Open cassette loader, 8"-12"
PDBS (Ehanced)
Dual beam spectrometer (XENON Lamp)
Spectroscopic Ellipsometer (SE)
DUV SE (Deep UV SE, 190 nm)
Pat maximum: 8100
CPU
Frequency: 2.6 GHz
Operating system: Windows NT.
