用 KLA / TENCOR ASET-F5x #9363501 待售的

ID#: 9363501

製造商:

KLA / TENCOR

模型:

ASET-F5x

晶圓尺寸:

8"-12"

設備詳細信息:

Film thickness measurement system, 8"-12"
Open cassette loader, 8"-12"
PDBS (Ehanced)
Dual beam spectrometer (XENON Lamp)
Spectroscopic Ellipsometer (SE)
DUV SE (Deep UV SE, 190 nm)
Pat maximum: 8100
CPU
Frequency: 2.6 GHz
Operating system: Windows NT.
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