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TEGAL 903E
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TEGAL 903E #293654462

TEGAL

903E

Etcher, 6" Through the wall Handles: 3"-6" Silicon Reactor chamber with upper and lower electrode Su
252
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TEGAL 903E #9004065

TEGAL

903E

Etcher.
217
TEGAL 903E #9004066

TEGAL

903E

Etcher.
259
TEGAL 903E #115926

TEGAL

903E

Plasma etcher, in-line single wafer, 4" Can handle 3" to 6" wafers, currently configured for 4" Cass
503
TEGAL 903E #293744352

TEGAL

903E

Etcher.
30
TEGAL 903E #9113440

TEGAL

903E

Etcher, 5" Chiller Vacuum.
211
TEGAL 903E #293594316

TEGAL

903E

Etcher, 5" Convertible up to 6".
235
TEGAL 903E #9269138

TEGAL

903E

Etcher, 6".
216
TEGAL 903E #9265524

TEGAL

903E

Etcher, 6".
258
TEGAL 903E #9250125

TEGAL

903E

Oxide etcher, 6".
197
TEGAL 903E #9181763

TEGAL

903E

Etchers, 6".
202
TEGAL 903E #33638

TEGAL

903E

Oxide Plasma etcher, cassette to cassette, 3"-6".
176